Optics and Precision Engineering, Volume. 18, Issue 12, 2603(2010)

Trigger control of touch probe for nano-CMM

CHENG Fang* and FEI Ye-tai
Author Affiliations
  • [in Chinese]
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    CLP Journals

    [1] HUANG Qiang-xian, YU Fu-ling, GONG Er-min, WANG Chen-chen, FEI Ye-tai. Nano-CMM stage with zero Abbe error and its error analysis[J]. Optics and Precision Engineering, 2013, 21(3): 664

    [2] CHEN Xiao-huai, CHEN He, WANG Shan, LI Rui-jun, GAO Wei. Design of elastic structure parameters of probe in micro-nano CMM[J]. Optics and Precision Engineering, 2013, 21(10): 2587

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    CHENG Fang, FEI Ye-tai. Trigger control of touch probe for nano-CMM[J]. Optics and Precision Engineering, 2010, 18(12): 2603

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    Paper Information

    Category:

    Received: Jan. 4, 2010

    Accepted: --

    Published Online: Jan. 26, 2011

    The Author Email: Fang CHENG (chf19chf19@163.com)

    DOI:

    CSTR:32186.14.

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