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Optics and Precision Engineering, Volume. 18, Issue 1, 60(2010)

Measurement of super-smooth surface by grazing X-ray scattering method

WANG Yong-gang1,2、*, MENG Yan-li1,2,3,4, MA Wen-sheng1, CHEN Bin1, and CHEN Bo1
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  • 1[in Chinese]
  • 2[in Chinese]
  • 3[in Chinese]
  • 4[in Chinese]
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    WANG Yong-gang, MENG Yan-li, MA Wen-sheng, CHEN Bin, CHEN Bo. Measurement of super-smooth surface by grazing X-ray scattering method[J]. Optics and Precision Engineering, 2010, 18(1): 60

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    Paper Information

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    Received: Jun. 4, 2009

    Accepted: --

    Published Online: Aug. 31, 2010

    The Author Email: Yong-gang WANG (vangernh@126.com)

    DOI:

    CSTR:32186.14.

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology