Optics and Precision Engineering, Volume. 25, Issue 1, 1(2017)
Interference fringe phase locking system
[1] [1] SCHATTENBURG M L, CHANG C H, HEILMANN R K, et al.. Advanced interference lithography for nanomanufacturing [C].Proceedings of the International Symposium on Nanomanufacturing(ISNM 2006), , 2006(Paper#44).
[2] [2] WOLFEREN H V, ABELMANN L. Laser Interference Lithography, in Lithography: Principles, Processes and Materials [M]. New York: Nova Science Publishers, 2011.
[3] [3] YOUNG P P, PRIAMBODO P S, MALDONADO T A, et al.. Simple interferometric fringe stabilization by charge-coupled-device-based feedback control [J]. Applied Optics, 2006, 45(19): 4563-4566.
[4] [4] HAEFNER M, PRUSS C, OSTEN W. Laser direct writing of rotationally symmetric high-resolution structures [J]. Applied Optics, 2011, 50(31): 5983-5989.
[5] [5] HEILMANN R K, KONKOLA P T, CHEN C G, et al.. Digital heterodyne interference fringe control system [J]. Journal of Vacuum Science & Technology B, 2001, 19(6): 2342-2346.
[6] [6] WANG L J, ZHANG M, ZHU Y, et al.. Design of phase locking system for an interference lithography scanner [J]. Journal of Tsinghua University: Science and Technology, 2015, 55(7): 722-727. (in Chinese)
[7] [7] KONKOLA P T. Design and Analysis of a Scanning Beam Interference Lithography System for Patterning Gratings with Nanometer-level Distortions [D].Cambridge: Massachusetts Institute of Technology, 2003.
[8] [8] SONG Y. Research on the Interference Fringe Static and Dynamic Phase-locking Technology in the Lithography System of the Holographic Grating [D]. Beijing: University of the Chinese Academy of Science, 2005. (in Chinese)
[9] [9] QIAN G L, LI CH M, YIN Q Y, et al.. Study of characteristic of fringe locking system used to holographic exposure [J]. Laser Technology, 2008, 32(6): 648-654. (in Chinese)
[11] [11] FORSSELL U. Closed-loop Identification: Methods, Theory, and Applications [D]. Sweden: Linkping University, 1999.
[12] [12] ZIEGLER J G, NICHOLS N B. Optimum settings for automatic controllers [J]. Trans. ASME, 1942, 64(11): 759-768.
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LU Sen, YANG Kai-ming, ZHU Yu, WANG Lei-jie, ZHANG Ming. Interference fringe phase locking system[J]. Optics and Precision Engineering, 2017, 25(1): 1
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Received: Sep. 5, 2016
Accepted: --
Published Online: Mar. 10, 2017
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