Optics and Precision Engineering, Volume. 25, Issue 1, 1(2017)

Interference fringe phase locking system

LU Sen... YANG Kai-ming, ZHU Yu, WANG Lei-jie and ZHANG Ming |Show fewer author(s)
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    References(12)

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    [3] [3] YOUNG P P, PRIAMBODO P S, MALDONADO T A, et al.. Simple interferometric fringe stabilization by charge-coupled-device-based feedback control [J]. Applied Optics, 2006, 45(19): 4563-4566.

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    [6] [6] WANG L J, ZHANG M, ZHU Y, et al.. Design of phase locking system for an interference lithography scanner [J]. Journal of Tsinghua University: Science and Technology, 2015, 55(7): 722-727. (in Chinese)

    [7] [7] KONKOLA P T. Design and Analysis of a Scanning Beam Interference Lithography System for Patterning Gratings with Nanometer-level Distortions [D].Cambridge: Massachusetts Institute of Technology, 2003.

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    LU Sen, YANG Kai-ming, ZHU Yu, WANG Lei-jie, ZHANG Ming. Interference fringe phase locking system[J]. Optics and Precision Engineering, 2017, 25(1): 1

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    Paper Information

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    Received: Sep. 5, 2016

    Accepted: --

    Published Online: Mar. 10, 2017

    The Author Email:

    DOI:10.3788/ope.20172501.0001

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