Infrared and Laser Engineering, Volume. 53, Issue 2, 20230543(2024)
Accuracy analysis of a three-dimensional angle measurement sensor based on dual PSDs
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Fig. 8. (a) Noise fitting curve; (b) Curve after filtering with a 34th order FIR filter
Fig. 9. Curve plot of input signal frequency at (a) 1.00 Hz, (b) 10.00 Hz, (c) 100.00 Hz and (d) 1.00 kHz
Fig. 10. Curve plot of input signal frequency at (a) 184 Hz and (b) 1.31 kHz
Fig. 11. Comparison diagram between collected data and filtered data
Fig. 12. Comparison diagrams of (a) yaw angle measurement values, (b) pitch angle measurement values, (c) roll angle measurement values before and after filtering
Table 1. Performance indicators of each three-axis angle measurement methods
View tableView in ArticleTable 1. Performance indicators of each three-axis angle measurement methods
Specifications Dual autocollimation instrument type MCCR instrument type Three PSD grating type Angle measurement range ±2' ±10° ±360" Yaw angle measurement error 2.2" 394.16" 0.013" Pitch angle measurement error 2.5" 455.36" 0.012" Roll angle measurement error 8.7" 319.57" 0.009"
Table 2. Performance indicators of six axis hexapod nano displacement table
View tableView in ArticleTable 2. Performance indicators of six axis hexapod nano displacement table
Performance Typical value/μm Performance Typical value/μrad X, Y accuracy ±0.6 $ {\theta } $ $ {\theta } $ ±3 Z accuracy ±0.2 $ {\theta } $ ±9 X, Y resolution ratio 0.3 $ {\theta } $ $ {\theta } $ 3 Z resolution ratio 0.2 $ {\theta } $ 5
Table 3. Angle measurement error
View tableView in ArticleTable 3. Angle measurement error
Yaw angle measurement error $ {\sigma _{{x}}} $ Pitch angle measurement error $ {\sigma _{{y}}} $ Roll angle measurement error $ {\sigma _{{z}}} $ No filtering: Yaw angle 0.005 0.012 0.021 No filtering: Pitch angle 0.005 0.011 0.020 No filtering： Roll angle 0.007 0.015 0.026 No filtering: Combined measurement 0.013 0.020 0.039 Filtering: Yaw angle 0.003 0.007 0.013 Filtering： Pitch angle 0.002 0.007 0.015 Filtering: Roll angle 0.004 0.007 0.017 Filtering: Combined measurement 0.006 0.009 0.021
Table 4. Experimental results of the effect of translation on angle measurement
View tableView in ArticleTable 4. Experimental results of the effect of translation on angle measurement
Yaw angle translation influence ${\sigma }_{{x} }^{\prime}$ Pitch angle translation influence ${\sigma }_{{y} }^{\prime}$ Roll angle translation influence ${\sigma }_{{z} }^{\prime}$ Move forward 2 mm 0.001 0.001 0.007 Move back 2 mm 0.004 0.001 0.003 Move up 2 mm 0.003 0.001 0.004 Move down 2 mm 0.002 0.001 0.005 Move left 2 mm 0.002 0.001 0.004 Move right 2 mm 0.001 0.002 0.005
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Wenhe Zhao, Yangyang Bai, Jinkai Wang, Lizhong Zhang. Accuracy analysis of a three-dimensional angle measurement sensor based on dual PSDs[J]. Infrared and Laser Engineering, 2024, 53(2): 20230543
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Received: Sep. 22, 2023
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Published Online: Mar. 27, 2024
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