[in Chinese]; [in Chinese]; [in Chinese]

Optics and Precision Engineering, Volume. 11, Issue 5, 492(2003)

[in Chinese]

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References(2)

[1] [1] HOLMES M,HOCKEN R, TRUMPER D. The long-range scanning stage: a novel platform for scanned-probe microscopy[J]. Precision Engineering,2000,(24):191-209.

[5] [5] TRAUNTEUT A T. Technology and applications of grating interferometers in high-precision measurement[J]. Precision Engineering,1992,14(3):147-154.

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[in Chinese], [in Chinese], [in Chinese]. [J]. Optics and Precision Engineering, 2003, 11(5): 492

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