Acta Optica Sinica, Volume. 33, Issue 8, 806002(2013)
Fiber Fabry-Pérot Accelerometer Based on SU-8 Photoresist
[1] [1] Jesus M Corres, Javier Bravo, Francisco J Arregui, et al.. Vibration monitoring in electrical engines using an in-line fiber etalon [J]. Sensors and Actuators A, 2006, 132(12): 506-515.
[4] [4] Xu Yuxian, Zhao Changde, Sun Xudong, et al.. Accelerometer and its application in vehicles comfort evaluation [J]. J Tsinghua University (Sci & Tech), 1998, 38(11): 9-11.
[5] [5] Xiong Xingguo, Zou Qiang, Lu Deren, et al.. Silicon bulk-micromachined interdigitated differential capacitive accelerometer [J]. Journal of Functional Materials and Devices, 1998, 4(2): 114-120.
[6] [6] Du Linqun, Jia Shengfang, Nie Weirong, et al.. Fabrication of fuze micro-electro-mechanical system safety device [J]. Chinese Journal of Mechanical Engineering, 2011, 24(5): 836-841.
[7] [7] He Gaofa, Tang Yike, Zhou chuande, et al.. Novel resonant accelerometer with micro leverage fabricated by MEMS technology [J]. Chinese Journal of Mechanical Engineering, 2011, 24(3): 495-500.
[8] [8] Jinghua Zhang, Xueguang Qiao, Manli Hu, et al.. Proposal of metal bellows-based fiber bragg grating accelerometer [J]. Chin Opt Lett, 2011, 9(9): 090606.
[9] [9] Lou Jun, Fu Shaojun, Xu Xiangdong, et al.. Design and fabrication of holographic variable line-spacing grating for position sensor [J]. Acta Physica Sinica, 2006, 55(12): 6405-6409.
[10] [10] Zhang Le, Wu Bo, Ye Wen, et al.. Highly sensitive fiber-optic vibration sensor based on frequency-locking of a FBG Fabry-perot cavity [J]. Acta Optica Sinica, 2011, 31(4): 0406006.
[14] [14] Chun-Jun Lin, Fan-Gang Tseng. A micro Fabry-Perot sensor for nano-lateral displacement sensing withenhanced sensitivity and pressure resistance [J]. Sensor and Actuator A, 2004, 114(2-3): 163-170.
[15] [15] Gou Wenxuan. Mechanics of Materials(I) (2nd edition) [M]. Beijing: Science Press, 2010. 315-320.
[16] [16] Chen Hong, Bao Minhang. Air damping of micromechanical silicon accelerometers [J]. Chinese Journal of Semiconductors, 1995, 16(12): 921-927.
Get Citation
Copy Citation Text
You Jingjing, Wang Ming, Rong Hua, Dai Lihua. Fiber Fabry-Pérot Accelerometer Based on SU-8 Photoresist[J]. Acta Optica Sinica, 2013, 33(8): 806002
Category: Fiber Optics and Optical Communications
Received: Jan. 31, 2013
Accepted: --
Published Online: Jul. 16, 2013
The Author Email: Jingjing You (shania_you@163.com)