Fig. 1. Coupling of organic contamination droplet and defect in a single-layer TiO₂ film with a protective film model

Fig. 2. Effect of protective layer on the distribution of electric field coupling between organic contamination droplet and defect

Fig. 3. Distribution of electric field coupling between the organic contamination droplet and the defect under different thickness protective layers

Fig. 4. Intensity of electric field coupling between the organic contamination droplet and the defect under different refractive index protective layers

Fig. 5. Laser damage threshold of the thin film adding protective film of different thicknesses