Journal of Inorganic Materials, Volume. 39, Issue 8, 929(2024)

Preparation of Y2O3 Coating by Suspension Plasma Spraying and Its Resistance to Plasma Etching

Wen MA1...2, Zhe SHEN1,2, Qi LIU1,2, Yuanming GAO1,2, Yu BAI1,2, and Rongxing LI12 |Show fewer author(s)
Author Affiliations
  • 11. Inner Mongolia Key Laboratory of Thin Film and Coatings, School of Materials Science and Engineering, Inner Mongolia University of Technology, Hohhot 010051, China
  • 22. Inner Mongolia Engineering Research Center of Rare-earth New Materials and Functional Coatings, Hohhot 010051, China
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    Figures & Tables(10)
    XRD patterns of Y2O3 raw power and its coatings prepared by four processes
    Cross-sectional microstructures of the Y2O3 coatings prepared by four processes
    Bonding strength and microhardness of the Y2O3 coatings prepared by four processes
    Porosities and dielectric strengths of the Y2O3 coatings prepared by four processes
    Surface microstructures of the Y2O3 coatings prepared by four processes after etching for 0, 30, 60 and 120 min
    Porosities and etching rates of the Y2O3 coatings prepared by four processes
    XRD patterns of the Y2O3 coatings prepared by four processes after etching for 120 min
    EDS analyses of the Y2O3 coatings prepared by four processes and etched for 120 min
    • Table 1. Fixed process parameters for preparing Y2O3 coating

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      Table 1. Fixed process parameters for preparing Y2O3 coating

      Process parameterValue
      Gas volume ratio (Ar : N2 : H2)6 : 3 : 1
      Total gas flow/slpm180
      Arc current/A220
      Atomization gas flow rate/(L·min-1)15
      Horizontal moving speed of spray gun/(mm·s-1)700
    • Table 2. Preparation process parameters of Y2O3 coating

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      Table 2. Preparation process parameters of Y2O3 coating

      ProcessSpray distance/mmSuspention injection rate/(mL·min-1) Vertical moving step/(mm·step-1)
      180351.0
      280451.5
      390351.5
      490451.0
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    Wen MA, Zhe SHEN, Qi LIU, Yuanming GAO, Yu BAI, Rongxing LI. Preparation of Y2O3 Coating by Suspension Plasma Spraying and Its Resistance to Plasma Etching [J]. Journal of Inorganic Materials, 2024, 39(8): 929

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    Paper Information

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    Received: Nov. 29, 2023

    Accepted: --

    Published Online: Dec. 12, 2024

    The Author Email:

    DOI:10.15541/jim20230548

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