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Semiconductor Optoelectronics, Volume. 44, Issue 4, 605(2023)

Shape Reconstruction Method Based on Strain Mode Shape and Error Compensation

SHANG Qiufeng1...23 and ZHANG Xiaoxu1,* |Show fewer author(s)
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    SHANG Qiufeng, ZHANG Xiaoxu. Shape Reconstruction Method Based on Strain Mode Shape and Error Compensation[J]. Semiconductor Optoelectronics, 2023, 44(4): 605

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    Received: Apr. 10, 2023

    Accepted: --

    Published Online: Nov. 26, 2023

    The Author Email: Xiaoxu ZHANG (18845155689@163.com)

    DOI:10.16818/j.issn1001-5868.2023041001

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology