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Opto-Electronic Engineering, Volume. 41, Issue 8, 16(2014)

3D Micro Topography Measurement Based on Spatial Frequency Domain Algorithm

XU Yongxiang*... ZHANG Qianfang, LIU Songsong and LIU Yi |Show fewer author(s)
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    XU Yongxiang, ZHANG Qianfang, LIU Songsong, LIU Yi. 3D Micro Topography Measurement Based on Spatial Frequency Domain Algorithm[J]. Opto-Electronic Engineering, 2014, 41(8): 16

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    Received: Nov. 15, 2013

    Accepted: --

    Published Online: Sep. 1, 2014

    The Author Email: Yongxiang XU (yx_xu@sina.com)

    DOI:10.3969/j.issn.1003-501x.2014.08.003

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology