Acta Optica Sinica, Volume. 23, Issue 8, 984(2003)
Analysis of Optical Property for Several Ultraviolet Thin Film Materials
[1] [1] Hass G, Ritter E. Optical film materials and their applications. J. Vacuum Science and Technol., 1966, 4(2):71~79
[2] [2] Arndt D P, Azzam R M A, Bennett J M et al.. Multiple determination of the optical constants of thin-film coating materials. Appl. Opt., 1984, 23(20):3571~3596
[3] [3] Zukic M, Torr D G, Spann J F et al.. Vacuum ultraviolet thin films. 1: Optica constants of BaF2,CaF2,LaF3,MgF2,Al2O3,HfO2, and SiO2. Appl. Opt., 1990, 29(28):4284~4292
[4] [4] Bennett J M, Booty M J. Computational method for determining n and k for a thin film from the measured reflectance,transmittance, and film thickness. Appl. Opt., 1966, 5(1):41~43
[5] [5] Ward L. A survey of the accuracies of some methods for the determination of the optical constants of thin films. Opt. Acta, 1985, 32(2):155~167
[6] [6] Wood Ⅱ O R, Craighead H G, Sweeney J E et al.. Vacuum ultraviolet loss in magnesium fluoride films. Appl. Opt., 1984, 23(20):3644~3649
[7] [7] Gupta M C. Optical constant determination of thin films. Appl. Opt., 1988, 27(51):954~956
[8] [8] Aqili A K S, Maqsood A. Determination of thichness, refractive index, and thickness irregularity for semiconductor thin films from transmission spectra. Appl. Opt., 2002, 41(1):218~224
[9] [9] Rainer F, Lowdermilk W H, Milam D et al.. Materials for optical coatings in the ultraviolet. Appl. Opt., 1985, 24(4):496~500
[10] [10] Alvisi M, Scaglione S, Martelli S et al.. Structural and optical modification in hafnium oxide thin films related to the momentum patameter transferred by ion beam assistance. Thin Solid Films, 1999, 354(1,2):19~23
[11] [11] Manifacier J C, Gasiot J. A simple method for the determination of the optical constant n,k and the thickness of a weakly absorbing thin film. J. Phys. E. Scientific Instruments, 1976, 9(11):1002~1004
[12] [12] Hall J F, Ferguson J W F C. Optical properties of cadmium sulfide and zinc sulfide from 0.6 micron to 14 microns. J. Opt. Soc. Am, 1955, 45(9):714~718
Get Citation
Copy Citation Text
[in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese]. Analysis of Optical Property for Several Ultraviolet Thin Film Materials[J]. Acta Optica Sinica, 2003, 23(8): 984