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Spectroscopy and Spectral Analysis, Volume. 44, Issue 10, 2900(2024)

Optical System Design of High-Precision Line-Scanning Spectral Confocal Displacement Sensor

YANG Wei-guang1...2, ZHANG Zhou-feng1,*, QI Mei-jie1, YAN Jia-yue1,2, and CHENG Mo-han12 |Show fewer author(s)
Author Affiliations
  • 1Laboratory of Spectral Imaging Technology, Xi’an Institute of Optics and Fine Mechanics, Chinese Academy of Sciences, Xi’an　710119, China
  • 2University of Chinese Academy of Sciences, Beijing　100049, China
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    YANG Wei-guang, ZHANG Zhou-feng, QI Mei-jie, YAN Jia-yue, CHENG Mo-han. Optical System Design of High-Precision Line-Scanning Spectral Confocal Displacement Sensor[J]. Spectroscopy and Spectral Analysis, 2024, 44(10): 2900

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    Paper Information

    Received: Jun. 5, 2023

    Accepted: Jan. 16, 2025

    Published Online: Jan. 16, 2025

    The Author Email: Zhou-feng ZHANG (zhangzhoufeng@opt.ac.cn)

    DOI:10.3964/j.issn.1000-0593(2024)10-2900-09

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology