Optics and Precision Engineering, Volume. 17, Issue 6, 1415(2009)
Design and fabrication of bulk micromachined tunneling gyroscope with fan-shaped comb drivers
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WANG Ling-yun, LI Wen-wang, ZHUANG Gen-huang, SUN Dao-heng. Design and fabrication of bulk micromachined tunneling gyroscope with fan-shaped comb drivers[J]. Optics and Precision Engineering, 2009, 17(6): 1415
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