Chinese Journal of Quantum Electronics, Volume. 41, Issue 2, 278(2024)

Synchronization characteristics of deep ultraviolet femtosecond pulse amplified by excimer laser

FAN Jun1,2、*, YANG Lizhao1,2, YOU Libing3,4, RONG Dandan1,2, WANG Hongwei1,2, CUN Chao1,2, and FANG Xiaodong1,2,3
Author Affiliations
  • 1Anhui Provincial Key Laboratory of Photonics Devices and Materials, Anhui Institute of Optics and Fine Mechanics,HFIPS, Chinese Academy of Sciences, Hefei 230031, China
  • 2University of Science and Technology of China, Hefei 230026, China
  • 3College of New Materials and New Energies, Shenzhen Technology University, Shenzhen 518118, China
  • 4Shenzhen Shengfang Technology Limited Company, Shenzhen 518173, China
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    In order to obtain deep ultraviolet (UV) ultrashort pulses with large energy, deep UV femtosecond seed light is amplified by an ArF excimer amplifier. By measuring the seed light signal and the fluorescence signal of the excimer amplifier, the effect of the delay between the seed light signal and the amplifier discharge signal on the single amplification characteristics of the pulse was investigated under different environments. The results show that the amplification system achieves precise synchronization of seed light and excimer amplifier with low jitter, the maximum pulse energy in air and nitrogen is 197.2 μJ and 312.6 μJ, respectively, and the pulse spreading in nitrogen environment is reduced by 99.2 fs on average compared with in air. It is proved that compared to air environment, nitrogen environment can effectively reduce the energy decay and pulse spreading of deep UV ultrashort pulses, and synchronous jitter has less influence on amplification characteristics.

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    Jun FAN, Lizhao YANG, Libing YOU, Dandan RONG, Hongwei WANG, Chao CUN, Xiaodong FANG. Synchronization characteristics of deep ultraviolet femtosecond pulse amplified by excimer laser[J]. Chinese Journal of Quantum Electronics, 2024, 41(2): 278

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    Paper Information

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    Received: Mar. 15, 2022

    Accepted: --

    Published Online: Jun. 24, 2024

    The Author Email:

    DOI:10.3969/j.issn.1007-5461.2024.02.010

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