Optics and Precision Engineering, Volume. 22, Issue 11, 2945(2014)
MEMS-tunable Ⅲ-nitride grating on silicon substrate
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LI Xin, SHI Zheng, HE Shu-min, GAO Xu-min, ZHANG Miao, WANG Yong-jin. MEMS-tunable Ⅲ-nitride grating on silicon substrate[J]. Optics and Precision Engineering, 2014, 22(11): 2945
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Received: Nov. 1, 2013
Accepted: --
Published Online: Dec. 8, 2014
The Author Email: Xin LI (lixin1984@njupt.edu.cn)
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