Laser & Optoelectronics Progress, Volume. 58, Issue 7, 0718001(2021)
Analysis and Restriction About Accumulated Phase Error in Spacial Frequency-Domain Algorithm for White-Light Interferomety
Fig. 1. Schematic of signal acquisition for white-light interferometry
Fig. 2. Schematic of traditional FDA algorithm
Fig. 3. Schematic of phase difference for discrete sampling interference signal analysis
Fig. 4. Schematic of ESAA
Fig. 5. Simulation sample and interferograms. (a) Original surface; (b) surface with a tilted dautm; (c) interferograms
Fig. 6. Simulation results. (a)(b) Surface topography and residual error measured by traditional FDA method; (c)(d) surface topography and residual error measured by ESAA method
Fig. 7. Comparison of cross-section profiles. (a) Traditional FDA method; (b) ESAA method
Fig. 8. Experiment setup
Fig. 9. Interferograms. (a) Grating structure; (b) spherical structure
Fig. 10. Grating structure measurement results. (a)(b) Surface topography containing the same inclined datum, measured by traditional FDA method and ESAA method; (c) inclined datum extracted from Fig. (b); (d)(e) surface topography after removing inclined datum from Fig. (a) and (b), respectively; (f) residual error between Fig. (d) and (e)
Fig. 11. Cross-section profile for grating structure. (a) Cross-section profile measured by traditional FDA method; (b) cross-section profile measured by ESAA method; (c) cross-section profile of residual error; (d) cross-section profile measured by stylus profiler
Fig. 12. Spherical structure measurement results. (a) Traditional FDA method; (b) ESAA method; (c) residual error between Fig. (a) and (b); (d)-(f) cross-section profiles of Fig. (a)-(c) at 250th row, respectively
Fig. 13. Measurement results after wavelet denoising. (a) Grating structure surface topography; (b) spherical structure surface topography; (c) cross-section profile of grating structure; (d) cross-section profile of spherical structure
|
|
|
Get Citation
Copy Citation Text
Qinyuan Deng, Qingqing Huang, Jie Hou, Yan Zhang, Fei Xiong, Junhua Chen. Analysis and Restriction About Accumulated Phase Error in Spacial Frequency-Domain Algorithm for White-Light Interferomety[J]. Laser & Optoelectronics Progress, 2021, 58(7): 0718001
Category: Microscopy
Received: Aug. 17, 2020
Accepted: Sep. 3, 2020
Published Online: Apr. 25, 2021
The Author Email: Huang Qingqing (qingq.huang@gmail.com)