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Laser & Optoelectronics Progress, Volume. 54, Issue 10, 101203(2017)

Nonlinear Error Calibration Method for Capacitive Displacement Sensor Based on Laser Interferometry

Wang Dapeng*, Jin Xing, Zhou Weijing, and Li Nanlei
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    Article index updated:May. 24, 2024

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    Wang Dapeng, Jin Xing, Zhou Weijing, Li Nanlei. Nonlinear Error Calibration Method for Capacitive Displacement Sensor Based on Laser Interferometry[J]. Laser & Optoelectronics Progress, 2017, 54(10): 101203

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    Paper Information

    Category: Instrumentation, Measurement and Metrology

    Received: Jun. 11, 2017

    Accepted: --

    Published Online: Oct. 9, 2017

    The Author Email: Dapeng Wang (ajwzajwz@163.com)

    DOI:10.3788/lop54.101203

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology