Optical Instruments, Volume. 41, Issue 2, 6(2019)
Simulation and experiment of sapphire substrate based on oblique incidence
References(3)
[3] [3] VANNONI M, MARTìN I F. Surface measurements in “grazing incidence ” interferometry for long x-ray mirrors: theoretical limits and practical implementations[C]//Proceedings Volume 9962, Advances in Metrology for X-Ray and EUV Optics Ⅵ. San Diego, California, United States: SPIE, 2016: 996207.
[4] [4] BRIERS J D. Interferometric flatness testing of nonoptical surfaces[J]. Applied Optics, 1971, 10(3): 519-524.
[5] [5] BIRCH K G. Oblique incidence interferometry applied to non-optical surfaces[J]. Journal of Physics E: Scientific Instruments, 1973, 6(10): 1045-1048.
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LIU Zhiyuan, CHEN Lei, ZHU Wenhua, DING Yu, HAN Zhigang. Simulation and experiment of sapphire substrate based on oblique incidence[J]. Optical Instruments, 2019, 41(2): 6
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Received: Apr. 10, 2018
Accepted: --
Published Online: Jun. 22, 2019
The Author Email: Zhiyuan LIU (liuzhiyuan@njust.edu.cn)
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