Optics and Precision Engineering, Volume. 11, Issue 6, 567(2003)

[in Chinese]

[in Chinese]^1,2, [in Chinese]¹, [in Chinese]¹, [in Chinese]¹, [in Chinese]¹, and [in Chinese]¹

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¹[in Chinese]

²[in Chinese]

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References(6)

[1] [1] ZHAO C Y, JAMES H B. Vibration-compensated interferometer for surface metrology[J]. Appl Opt, 2001,40 (34): 6215-6222.

[2] [2] KOPIOPOULOS C L. Simultaneous phase shift interferometer[J]. SPIE, 1991, 1513:119-127.

[3] [3] NORTH-MORRIS M B,van DELDEN J, JAMES C W. Phase-shifting birefringent scatter plate interferometer[J]. Appl Opt, 2002,41(4):668-677.

[4] [4] COLE G C, JAMES H B, LEE R D. Vibration stabilization of a phase shifting interferometer for large optics[J]. SPIE, 1997,3134:438-446.

[5] [5] FRESCHI A A, FREJLICH J. Adjustable phase control in stabilized interferometry[J]. Opt Lett, 1995,20(6): 635-637.

[6] [6] WU D, CHEN J B, CHEN L, et al. Vibration-resistance technology of phase-shifting interferometer[J]. SPIE, 2002,4927: 385-389.

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[in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese]. [J]. Optics and Precision Engineering, 2003, 11(6): 567

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Received: Apr. 12, 2003

Accepted: --

Published Online: Nov. 3, 2006

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