Acta Photonica Sinica, Volume. 43, Issue 11, 1116006(2014)

Vapor Etching Method for Diamond Wire Sawn Multicrystalline Silicon Wafers

LIU Xiao-mei*... CHEN Wen-hao, LI Miao and ZHOU Lang |Show fewer author(s)
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    LIU Xiao-mei, CHEN Wen-hao, LI Miao, ZHOU Lang. Vapor Etching Method for Diamond Wire Sawn Multicrystalline Silicon Wafers[J]. Acta Photonica Sinica, 2014, 43(11): 1116006

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    Paper Information

    Category: Materials

    Received: Jul. 16, 2014

    Accepted: --

    Published Online: Dec. 8, 2014

    The Author Email: Xiao-mei LIU (l0314@163.com)

    DOI:10.3788/gzxb20144311.1116006

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