Fig. 1. Schematic diagram of scanning

Fig. 2. Experimental optical path image and target image. (a) Optical path image; (b) Target image

Fig. 3. Performance index of ranging system. (a) Ranging precision; (b) Ranging accuracy; (c) Ranging precision at different photon counts; (d) Ranging accuracy at different photon counts

Fig. 4. (a) Ranging accuracy under different distances and different photon counts; (b) Ranging precision under different distances and different photon counts

Fig. 5. (a)-(f) Distribution of laser echo on array detector; (g) Distance measured at each target point

Fig. 6. (a) Target depth information map measured by rotary scanning; (b) Target depth information map without rotary scanning