Optics and Precision Engineering, Volume. 18, Issue 5, 1042(2010)

Compensation of nonlinear errors in laser heterodyne interferometers

CHEN Hong-fang1,*... ZHONG Zhi2 and DING Xue-mei3 |Show fewer author(s)
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  • 1[in Chinese]
  • 2[in Chinese]
  • 3[in Chinese]
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    References(9)

    [1] [1] SCHATTENBURG M L,SMITH H I.The critical role of metrology in nanotechnology [J].SPIE, 2002, 4608:116-124.

    [2] [2] YIN CH Y.Modern Interferometric Measuring Technique [M].Tianjin: Tianjin University Press.(in Chinese)

    [3] [3] HOU W, WILKENING G.Investigation and compensation of the nonlinearity of heterodyne interferometers [J].Precision Engng., 1992,14(2): 91-98.

    [4] [4] BADAMI V G,PATTERSON S R.A frequency domain method for the measurement of nonlinearity in heterodyne interferometry [J].Precision Engng, 2000,24: 1-49.

    [5] [5] YACOOT A,DOWNS M J.The use of x-ray interferometry to investigate the linearity of the NPL differential plane mirror optical interferometer [J].Meas Sci Technol, 2000,11(8):1126-1130.

    [6] [6] EOM T,CHOI T H,LEE K, et al..A simple method for the compensation of the nonlinearity in the heterodyne interferometer [J].Meas Sci Tech, 2002, 13: 222-225.

    [8] [8] XIE Y,WU Y Z.Elliptical polarization and non-orthogonality of stabilized zeeman laser output [J].Applied Optics.1989,28(11):2043-2046.

    [9] [9] DE FREITAS.Analysis of laser source birefringence and dichroism on nonlinearity in heterodyne interferometry[J].Meas.Sci.Technol.1997,8:1356-1359.

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    CHEN Hong-fang, ZHONG Zhi, DING Xue-mei. Compensation of nonlinear errors in laser heterodyne interferometers[J]. Optics and Precision Engineering, 2010, 18(5): 1042

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    Paper Information

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    Received: May. 21, 2009

    Accepted: --

    Published Online: Aug. 31, 2010

    The Author Email: Hong-fang CHEN (hfchen@bjut.edu.cn)

    DOI:

    CSTR:32186.14.

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