Optics and Precision Engineering, Volume. 18, Issue 5, 1042(2010)

Compensation of nonlinear errors in laser heterodyne interferometers

CHEN Hong-fang1,*... ZHONG Zhi2 and DING Xue-mei3 |Show fewer author(s)
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  • 1[in Chinese]
  • 2[in Chinese]
  • 3[in Chinese]
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    To compensate the nonlinear errors of heterodyne interferometers in nanometer measurement, an experimental investigation is conducted.Based on the polarization properties of a coated corner-cube retro-reflector, a model is derived for describing the effect of the axial rotation of a measuring cube-corner retro-reflector in the motion direction on the first-harmonic nonlinearity when a laser emits the elliptical polarized light.The simulation results indicate that the first-harmonic nonlinearity can be reduced by the axial rotation of the cube-corner retro reflector.The experimental result shows that the first harmonic nonlinearity is reduced from 3.48 to 1.39 nm when the axial orientation rotation angle of the measuring cube-corner retro reflector increases from 0° to 100°,which is 40% that of the original one.The method simplies the complexes of light path and circuit systems for nonlinear error compensation approaches.

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    CHEN Hong-fang, ZHONG Zhi, DING Xue-mei. Compensation of nonlinear errors in laser heterodyne interferometers[J]. Optics and Precision Engineering, 2010, 18(5): 1042

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    Paper Information

    Category:

    Received: May. 21, 2009

    Accepted: --

    Published Online: Aug. 31, 2010

    The Author Email: Hong-fang CHEN (hfchen@bjut.edu.cn)

    DOI:

    CSTR:32186.14.

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