Optics and Precision Engineering, Volume. 18, Issue 5, 1042(2010)
Compensation of nonlinear errors in laser heterodyne interferometers
To compensate the nonlinear errors of heterodyne interferometers in nanometer measurement, an experimental investigation is conducted.Based on the polarization properties of a coated corner-cube retro-reflector, a model is derived for describing the effect of the axial rotation of a measuring cube-corner retro-reflector in the motion direction on the first-harmonic nonlinearity when a laser emits the elliptical polarized light.The simulation results indicate that the first-harmonic nonlinearity can be reduced by the axial rotation of the cube-corner retro reflector.The experimental result shows that the first harmonic nonlinearity is reduced from 3.48 to 1.39 nm when the axial orientation rotation angle of the measuring cube-corner retro reflector increases from 0° to 100°,which is 40% that of the original one.The method simplies the complexes of light path and circuit systems for nonlinear error compensation approaches.
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CHEN Hong-fang, ZHONG Zhi, DING Xue-mei. Compensation of nonlinear errors in laser heterodyne interferometers[J]. Optics and Precision Engineering, 2010, 18(5): 1042
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Received: May. 21, 2009
Accepted: --
Published Online: Aug. 31, 2010
The Author Email: Hong-fang CHEN (hfchen@bjut.edu.cn)
CSTR:32186.14.