Acta Photonica Sinica, Volume. 51, Issue 4, 0412007(2022)
Self-calibration Correction Measurement of Micro-angle Based on F-P Etalon Multi-beam Interference Imaging
Figures & Tables(8)
Fig. 1. Micro-angle measurement optical path based on F-P etalon［18］
Fig. 2. Self-calibration process schematic diagram of micro-angle measurement system
Fig. 3. The algorithm error simulation results of exact fraction method
Fig. 4. Simulation results of F-P etalon interval calculation error changing with temperature and humidity
Fig. 6. Concentric interference rings corresponding to different wavelengths
Table 1. Different wavelength λj and its corresponding εj and k0j
View tableView in ArticleTable 1. Different wavelength λj and its corresponding εj and k0j
λ1 = 546.081 10 nm λ2 = 576.967 84 nm λ3 = 579.074 30 nm εj 0.766 4 0.616 3 0.201 9 Uεj 0.010 2 0.009 9 0.009 5 k0j 7 325 6 933 6 908
Table 2. Comparison of micro-angle measurement results before and after self-calibration
View tableView in ArticleTable 2. Comparison of micro-angle measurement results before and after self-calibration
No. δ/μm Not self-calibrated
f1=80 mm
Up（f1）/f1=0.361
Self-calibrated but not corrected
f2=78.178 mm
Up（f2）/f2=0.014
Self-calibrated and corrected
f '=78.540 mm
Up（f '）/f '=0.007
α/（″） Up（α）/（″） α/（″） Up（α）/（″） α'/（″） Up（α'）/（″） 0-1 0.157 0.012 0.202 0.041 0.207 0.041 0.206 0.041 0-2 0.269 0.012 0.347 0.041 0.354 0.041 0.353 0.041 0-3 0.263 0.012 0.339 0.041 0.348 0.041 0.345 0.041 1-1 76.991 0.014 99.253 0.398 101.567 0.056 101.098 0.048 1-2 77.169 0.013 99.483 0.399 101.802 0.056 101.331 0.048 1-3 77.237 0.012 99.570 0.399 101.891 0.056 101.421 0.048 2-1 153.655 0.014 198.085 0.755 202.701 0.071 201.766 0.055 2-2 153.699 0.013 198.142 0.755 202.759 0.071 201.824 0.055 2-3 153.806 0.013 198.280 0.756 202.900 0.071 201.964 0.055 3-1 230.224 0.012 296.794 1.111 303.710 0.087 302.309 0.062 3-2 230.291 0.012 296.880 1.111 303.800 0.087 302.397 0.062 3-3 230.434 0.013 297.064 1.112 303.988 0.087 302.584 0.062 4-1 306.901 0.012 395.641 1.468 404.863 0.102 402.993 0.069 4-2 306.958 0.012 395.715 1.468 404.937 0.102 403.068 0.069 4-3 307.099 0.011 395.896 1.469 405.123 0.102 403.253 0.069 5-1 383.563 0.012 494.468 1.824 505.993 0.117 503.657 0.077 5-2 383.611 0.012 494.530 1.825 506.057 0.117 503.720 0.077 5-3 383.819 0.012 494.798 1.826 506.330 0.117 503.993 0.077 6-1 460.229 0.012 593.300 2.181 607.128 0.132 604.325 0.084 6-2 460.323 0.012 593.421 2.181 607.252 0.132 604.448 0.084 6-3 460.297 0.012 593.388 2.181 607.217 0.132 604.414 0.084
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Shinan ZHOU, Xiaoyan SHEN, Dongsheng LI, Chenguang WU. Self-calibration Correction Measurement of Micro-angle Based on F-P Etalon Multi-beam Interference Imaging[J]. Acta Photonica Sinica, 2022, 51(4): 0412007
Paper Information
Category: Instrumentation, Measurement and Metrology
Received: Oct. 28, 2021
Accepted: Nov. 26, 2021
Published Online: May. 18, 2022
The Author Email: SHEN Xiaoyan (xyshen@cjlu.edu.cn)
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