Optics and Precision Engineering, Volume. 26, Issue 5, 1133(2018)
Design and fabrication of passive MEMS pressure switch
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LIU Yi-fang, CHEN Dan-er, DAI Ting-ting. Design and fabrication of passive MEMS pressure switch[J]. Optics and Precision Engineering, 2018, 26(5): 1133
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Received: Sep. 15, 2017
Accepted: --
Published Online: Aug. 14, 2018
The Author Email: LIU Yi-fang (yfliu@xmu.edu.cn)
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