Researching | Full leaf-spring type spatial large-stroke parallel flexure micro-positioning stage and trajectory control

Optics and Precision Engineering, Volume. 31, Issue 18, 2675(2023)

Full leaf-spring type spatial large-stroke parallel flexure micro-positioning stage and trajectory control

Yunzhuang CHEN1... Leijie LAI1,*, Pengzhi LI2,3 and Limin ZHU4 |Show fewer author(s)

Author Affiliations

¹School of Mechanical and Automotive Engineering， Shanghai University of Engineering Science， Shanghai20620， China

²School of Computing and Engineering， University of Gloucestershire， Cheltenham， GL50 RH， UK

³Changchun Institute of Optic， Fine Mechanics and Physics， Chinese Academy of Sciences， Changchun100， China

⁴State Key Laboratory of Mechanical System and Vibration， School of Mechanical Engineering， Shanghai Jiao Tong University， Shanghai20020， China

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References (22)

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Figures & Tables(20)

Fig. 1. Multi-DOF long-stroke flexure parallel mechanism

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Fig. 2. Structural diagram of leaf-spring flexure spherical hinge

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Fig. 3. Kinematic model of micro-positioning stage

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Fig. 4. Force analysis of clarinet

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Fig. 5. Structural diagram of leaf-spring flexure spherical hinge

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Fig. 6. Input stiffness analysis

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Fig. 7. Composite control block diagram of multi-DOF micropositioning stage

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Fig. 8. Measured frequency response and identification results

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Fig. 9. Amplitude and phase margin of uncorrected system before and after open-loop gain adjustment

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Fig. 10. Open loop bode diagram of the system after adding PI controller with phase advanced

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Fig. 11. SMC control block diagram

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Fig. 12. Experimental system of micro-positioning stage

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Fig. 13. Maximum stroke

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Fig. 14. Cross-axis coupling errors

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Fig. 15. Triangular wave track tracking results

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Fig. 16. Space cylindrical spiral track tracking results

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Table 1. Dimension parameters of spherical hinge
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Table 1. Dimension parameters of spherical hinge
参数 l₁，l₃ w₁，w₃ t_1-3 h₁ l₂ w₂ p₁，p₂
数值/mm 10.00 18.00 1.00 5.00 40.00 3.50 7.25

Table 2. Compliance of leaf-spring spherical hinge
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Table 2. Compliance of leaf-spring spherical hinge
柔度数值单位
$C_{Δ y - F_{y}}$ 1.013 9 mm/N
$C_{Δ z - F_{z}}$ 1.300 0 mm/N
$C_{α_{x} - M_{x}}$ 1.316 3 rad/（N·m）
$- C_{α_{y} - F_{z}}$ / $- C_{Δ z - M_{y}}$ 0.034 2 rad/N
$C_{α_{z} - F_{y}}$ / $C_{Δ y - M_{z}}$ 0.029 5 rad/N
$C_{α_{y} - M_{y}}$ / $C_{α_{z} - M_{z}}$ 1.061 5 rad/（N·m）

Table 3. Single-axis trajectory tracking performance of micro-positioning stage（Triangular wave track）
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Table 3. Single-axis trajectory tracking performance of micro-positioning stage（Triangular wave track）
误差指标 MAE RMSE
控制器 PID PAPI PAPI+SMC PID PAPI PAPI+SMC
e_θX/mrad 1.21 0.07 0.044 1.09 1.69×10^-2 1.47×10^-3
e_θY/mrad 1.317 0.056 0.023 1.21 1.39×10^-2 3.62×10^-4
e_Z/µm 135.3 5.05 4.62 122.4 1.212 1.188

Table 4. Three-axis spatial trajectory tracking performance of micro-positioning stage（Cylindrical spiral track)
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Table 4. Three-axis spatial trajectory tracking performance of micro-positioning stage（Cylindrical spiral track)
误差指标 MAE RMSE
控制器 PAPI PAPI+SMC PAPI PAPI+SMC
e_θX/mrad 0.27 0.057 7 0.015 7 2.96×10^-3
e_θY/mrad 0.21 0.044 0.012 5 6.27×10^-4
e_Z/µm 3.236 3.229 2.3 0.719

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Yunzhuang CHEN, Leijie LAI, Pengzhi LI, Limin ZHU. Full leaf-spring type spatial large-stroke parallel flexure micro-positioning stage and trajectory control[J]. Optics and Precision Engineering, 2023, 31(18): 2675

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Paper Information

Category: Micro/Nano Technology and Fine Mechanics

Received: Mar. 3, 2023

Accepted: --

Published Online: Oct. 12, 2023

The Author Email:

DOI:10.37188/OPE.20233118.2675

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