Optics and Precision Engineering, Volume. 27, Issue 7, 1516(2019)

Composite imprint lithography for mass producing large-area microstructures

LAN Hong-bo*... LIU Ming-yang, GUO Liang-le and XU Quan |Show fewer author(s)
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    LAN Hong-bo, LIU Ming-yang, GUO Liang-le, XU Quan. Composite imprint lithography for mass producing large-area microstructures[J]. Optics and Precision Engineering, 2019, 27(7): 1516

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    Paper Information

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    Received: Apr. 15, 2019

    Accepted: --

    Published Online: Sep. 2, 2019

    The Author Email: Hong-bo LAN (hblan99@126.com)

    DOI:10.3788/ope.20192707.1516

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