Fig. 1. Application of parallel mechanism

Fig. 2. Schematic diagram of actuation type

Fig. 3. PI micromotion table^［1］

Fig. 4. TM-1000 CMM^［5］

Fig. 5. CHE’s parallel CMM^［6］

Fig. 6. QI's parallel CMM^［7］

Fig. 7. CHEN’s parallel CMM^［8］

Fig. 8. MA's parallel CMM^［10］

Fig. 9. Equator300^［11］

Fig. 10. Delta parallel CMM^［12］

Fig. 11. MAHBOUBKHAH’s parallel CMM^［13］

Fig. 12. TAKAMASU's parallel CMM^［14］

Fig. 13. 3-PUU parallel CMM^［15］

Fig. 14. RUGBANI's CMM^［16］

Fig. 15. YU's serial-parallel CMM^［17-18］

Fig. 16. ZIEGERT's CMM^［27］

Fig. 17. ZHUANG's CMM^［28］

Fig. 18. GUO's CMM^［29］

Fig. 19. HARADA's CMM^［31］

Fig. 20. ZHOU's CMM^［33］

Fig. 21. ZHAO's CMM^［34］

Fig. 22. Configuration statistics of parallel CMMs