Acta Optica Sinica, Volume. 39, Issue 10, 1012001(2019)

Improving Measurement Accuracy of Two-Dimensional S-Transform Profilometry

Mengqi Han and Wenjing Chen*
Author Affiliations
  • Department of Optoelectronic Science and Technology, College of Electronics and Information Engineering, Sichuan University, Chengdu, Sichuan 610064, China
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    References(21)

    [1] Su X Y, Li J T[M]. Information optic, 306-338(1999).

    [2] Jin G F, Li J Z[M]. Laser metrology, 337(1998).

    [4] Srinivasan V, Liu H C, Halioua M. Automated phase-measuring profilometry of 3-D diffuse objects[J]. Applied Optics, 23, 3105-3108(1984).

    [8] Fu Y H, Chen W J. 2. 7(1):, 39, 41(2006).

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    Mengqi Han, Wenjing Chen. Improving Measurement Accuracy of Two-Dimensional S-Transform Profilometry[J]. Acta Optica Sinica, 2019, 39(10): 1012001

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    Paper Information

    Category: Instrumentation, Measurement and Metrology

    Received: Apr. 26, 2019

    Accepted: Jun. 10, 2019

    Published Online: Oct. 9, 2019

    The Author Email: Chen Wenjing (chenwj0409@scu.edu.cn)

    DOI:10.3788/AOS201939.1012001

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