[1] [1] SPEARING S M.Materials issues in

[2] [2] MEMS[J].Acta Mater,2000,48:179-196.

[3] [3] MALEKA C K,SAILE V.Applications of LIGA technology to precision manufacturing of high

[4] [4] aspect ratio microcomponents and-systems:a review[J].Microelectronics

[5] [5] Journal,2004,35:131-143.

[7] [7] SH X,WU Y H,XUAN M.Dynamic numerical simulation of a electromagnetic microfluidic active

[9] [9] H X,CHEN L G,SUN L N,et al..Design of micromanipulation instrument for

[10] [10] SCHULTZE J W,TSAKOV V.Electrochemical mierosystem technologys:from fundamental research

[11] [11] to technical systems[J].Electrochemimica Acta,1999,44:3605-3627.

[12] [12] BUDEVSKI E,STAIKOV G.Electrocrystallization nucleation and growth

[13] [13] phenomena[J].Electrochemimica Acta,2000,45:2559-2574.

[15] [15] A J,FAUKNER L R.Electrochemical Methods Fundamentals and Applications[M].Beijing:Chemical

[16] [16] Industry Press,2005.(in Chinese)

[18] [18] N,ZHANG J Q.Introduction of Electrochemical Impedance Spectroscopy[M].Beijing:Science

[19] [19] Press,2002.(in Chinese)

[20] [20] TAN Y J,LIM K Y.Understanding and improving the uniformity of

[21] [21] electrodeposition[J].Surface and Coatings Technology,2003,167:255-262.

[23] [23] R S,DU L Q,LIU CH,et al..Research on fabrication of micro-mould based on MEMS

[24] [24] technology[J].High Tehcnology,2006,16:368-371.(in Chinese)

[26] [26] M L,HUANG Q,ZHANG W,et al..Investigation on design method of single chamber piezoelectric

[27] [27] HORMES J,GOTTERT J,LIAN K,etal..Materials for LIGA and LIGA-based

[28] [28] microsystems[J].Nuclear Instruments and Methods in Physics Research B,2003,199:332-341.

[30] [30] X.Introduction of Electrode Kinetics Process[M].Beijing:Science Press,2002.(in Chinese)