Acta Photonica Sinica, Volume. 32, Issue 10, 1228(2003)
Hall Ion Source for Thin-film Coatings
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[3] [3] Willey R R.Some comparisons in the application of End-Hall and cold cathode ion sources in the conversion of SiO to SiO2.SPIE, 1994, 2262:14~20
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[5] [5] Fulton M L. Application of ion assisted deposition using a gridless end-Hall ion source for volume manufacturing of thin-film optical filters.SPIE, 1994,2253: 374~393
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[in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese]. Hall Ion Source for Thin-film Coatings[J]. Acta Photonica Sinica, 2003, 32(10): 1228