Optics and Precision Engineering, Volume. 15, Issue 12, 1959(2007)

AFM based femto-second laser nanofabrication of PMMA

[in Chinese]1... [in Chinese]1, [in Chinese]1, [in Chinese]2, [in Chinese]2 and [in Chinese]1 |Show fewer author(s)
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    References(5)

    [1] [1] JERSCH J,DEMMING F,DICKMANN K.Nanostructuring with laser radiation in the near field of a tip from a scanning force microscope[J].Appl.Phys.A,1997,64(1):29-32.

    [2] [2] YIN X B,FANG N,ZHANG X.Near-field two photon nanolithography using an apertureless optical probe[J].APL,2002,81(19):3663-3665.

    [7] [7] MISKOVSKY N M,PARK S H,HE J,et al..Energy exchange processes in field emission from atomically sharp metallic emitters[J].J.Vac.Sci.Technol B,1993,11(2):366-370.

    [8] [8] GESHEV P I,KLEIN S,DICKMANN K.Calculation of the temperature and thermal expansion of a STM tip heated by a short laser pulse[J].Appl.Phys.B,2003,76(3):313-317.

    [10] [10] KUNZ K,LUBBERS R.The Finite Difference Time Domain Method for Electromagnetics[M].Boca Raton,CRC Press.1993.

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    [in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese]. AFM based femto-second laser nanofabrication of PMMA[J]. Optics and Precision Engineering, 2007, 15(12): 1959

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    Paper Information

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    Received: Jun. 11, 2007

    Accepted: --

    Published Online: Jul. 8, 2008

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