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Acta Photonica Sinica, Volume. 49, Issue 10, 1014002(2020)

Research on Fabrication and Optoelectronic Properties of Surface Modified Silicon by Ultrafast Laser Pulse

Yang YANG... Chao LI and Ji-hong ZHAO |Show fewer author(s)
Author Affiliations
  • State Key Laboratory of Integrated Optoelectronics，College of Electronic Science and Engineering，Jilin University，Changchun 130012，China
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    Yang YANG, Chao LI, Ji-hong ZHAO. Research on Fabrication and Optoelectronic Properties of Surface Modified Silicon by Ultrafast Laser Pulse[J]. Acta Photonica Sinica, 2020, 49(10): 1014002

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    Paper Information

    Category: Lasers and Laser Optics

    Received: Apr. 28, 2020

    Accepted: Jun. 30, 2020

    Published Online: Mar. 10, 2021

    The Author Email:

    DOI:10.3788/gzxb20204910.1014002

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology