Acta Photonica Sinica, Volume. 40, Issue 10, 1509(2011)

Optical Characterization of Chemical Vapor Deposited Large-grained Polycrystalline Diamond Films by Raman and Infrared Spectroscopy

GU Li-ping1...2,* and TANG Chun-jiu12 |Show fewer author(s)
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  • 2[in Chinese]
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    References(12)

    [1] [1] BUTLER J E, MANKELEVICH Y A, CHEESMAN A, et al. Understanding the chemical vapor deposition of diamond: recent progress[J]. J Phys: Condens Matter, 2009, 21: 364201(20pp).

    [3] [3] HAQUE M S, NASEEM H A, SHULTZ J L, et al. Comparison of infrared, Raman, photoluminescence, and x-ray photoelectron spectroscopy for characterizing arc-jet-deposited diamond films[J].J Appl Phys, 1998, 83(8): 4421-4429.

    [4] [4] TANG C J, NEVES A J, CARMO M C. Characterization of chemical vapor deposited diamond films: correlation between hydrogen incorporation and film morphology and quality[J]. J Phys: Condens Matter, 2005, 17: 1687-1695.

    [6] [6] HAOUNI A, MERMOUX M, MARCUS B, et al. Confocal Raman imaging for the analysis of CVD diamond films[J]. Diamond Relat Mater, 1999, 8(2-5): 657-662.

    [7] [7] MOSSBRUCKER J, ASMUSSEN J. 3-D determination of the location and absolute amount of sp(2) and sp(3) bound carbon and stress components in CVD diamond films using multi-color polarized Raman spectroscopy[J]. Diamond Relat Mater, 1999, 8(2-5): 663-667.

    [8] [8] LI B, HAN B, LU X Y, et al. IR transmittance of large-sized free-standing transparent diamond films prepared by MWPCVD[J]. New Carbon Materials, 2008, 23(3): 245-249.

    [9] [9] YAN Y F, LI J B, WEI S H, et al. Possible approach to overcome the doping asymmetry in wideband gap semiconductors[J]. Phys Rev Lett, 2007, 98: 135506(3pp).

    [10] [10] YAN C X, DAI Y, LONG R, et al. Effect of excess hydrogen on the electronic properties of passivated diamond[J]. J Phys Chem Solids, 2009, 70(2): 307-311.

    [11] [11] ERZ R, JUNG K, EHRHARDT H, et al. Investigation of boron and hydrogen concentrations in p-type diamond films by infrared spectroscopy[J]. Diamond Relat Mater, 1995, 4(4): 469-472.

    [12] [12] TANG C J, NEVES A J, FERNANDES A J S. Influence of nucleation on hydrogen incorporation in CVD diamond films[J]. Diamond and Related Materials, 2002, 11(3-6): 527-531.

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    GU Li-ping, TANG Chun-jiu. Optical Characterization of Chemical Vapor Deposited Large-grained Polycrystalline Diamond Films by Raman and Infrared Spectroscopy[J]. Acta Photonica Sinica, 2011, 40(10): 1509

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    Paper Information

    Received: Nov. 12, 2010

    Accepted: --

    Published Online: Nov. 9, 2011

    The Author Email: Li-ping GU (gulp@cslg.cn)

    DOI:10.3788/gzxb20114010.1509

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