Fig. 1. Schematic of the optical path of large field-of-view WLI system

Fig. 2. Measured spectral curve for the white LED source

Fig. 3. Simulated distribution curve of white light interference signal before and after filtering

Fig. 4. Actual raw interference signal for the white LED source at a certain position

Fig. 5. Actual white light interference signal with different spectral filters

Fig. 6. Apparatus of large field-of-view white light interferometer

Fig. 7. Field-of-view at the object side

Fig. 8. Test of the lateral resolution

Fig. 9. Photo of the standard step sample

Fig. 10. Measurement result of the standard step 1

Fig. 11. Measurement result of the standard step 2

Fig. 12. Test of the reticle

Fig. 13. Test of the MEMS structure

Fig. 14. Test of the SiO₂ film on a Si wafer