Acta Optica Sinica, Volume. 38, Issue 4, 0412002(2018)
Comparison and Correction of Errors Caused by Radial Phase-Shifting Nonuniformity of Test Optics in Multi-Step Phase-Shifting
Errors causesd by radial phase-shifting nonuniformity of test optics are different when using different steps of phase-shifting algorithms to process interference fringes. Here, a error analysis model is established based on optical principle of point diffraction interferometery. Take 5, 6, 7 and 13 step phase-shifting algorithms as example, phase-shifting errors which are directly caused by radial phase-shifting nonuniformity are first analyzed, and then be introduced into the interferometry model. The influence of this phase-shifting error to final optical surface testing results are analyzed later and a new polynomial error correction method based on error preestimate is proposed. The analysis results show that the more the phase-shifting steps are, the larger the figure error caused by radial phase-shifting nonuniformity is. Each of these figure error shows a paraboloid like distribution. Also, removing the defocus item from Zernike polynomial of final optical surface testing results is equal to have had a quadratic polynomial correction of this error. If the numerical aperture of test optics are no more than 0.3, the error caused by radial phase-shifting nonuniformity can be ignored after the quadratic polynomial correction.
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Fen Gao, Jinping Ni, Bing Li, Ailing Tian. Comparison and Correction of Errors Caused by Radial Phase-Shifting Nonuniformity of Test Optics in Multi-Step Phase-Shifting[J]. Acta Optica Sinica, 2018, 38(4): 0412002
Category: Instrumentation, Measurement and Metrology
Received: Oct. 3, 2017
Accepted: --
Published Online: Jul. 10, 2018
The Author Email: Gao Fen (gaofen8128@163.com)