Fig. 1. (a) Block diagram of the resistor array structure; (b) Schematic of infrared image generation

Fig. 2. (a) Pixel drive circuit of resistor array device; (b) Work flow of snap shot mode and scanning mode

Fig. 3. Micro emitter voltage V_R& MOS tube driving efficiency vs. grating input voltageV_in

Fig. 4. Vertically integrated structure (a) and sectional drawing (b) of the micro emitter

Fig. 5. Refractive index (n) (a) and extinction coefficient (k) (b) of SiN_x and SiC films; Infrared optical characteristic simulation of micro emitter with and without SiC film (c)

Fig. 6. Temperature distribution (a) and displacement (b) simulation results of micro emitter under 0.6 mW

Fig. 7. Performance simulation results. (a) Apparent temperature vs power; (b) Radiance vs voltage control code; (c) Heat response curve

Fig. 8. MEMS process flow

Fig. 9. SEM micrograph of 640×410 micro emitter array sample

Fig. 10. LWIR image of 4×1 pixel driving in the air at the corner (a) and center (b) of a 640×410 array sample