Optics and Precision Engineering, Volume. 12, Issue z1, 36(2004)

MOEMS device and its applications

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    References(5)

    [1] [1] MEHREGANY M. Micro-electro-mechanical systems[J]. IEEE Circuit and Devices, 1993,35(7): 14-22.

    [2] [2] MICHALICEK M A, Introduction to MEMS, http:∥www. cumems. org [EB/OL]

    [3] [3] TUANTRANONT A, BRIGHT V M, ZHANG W, etal. Flip chip integration of lenslet arrays on segmented deformable micro-mirrors[J]. SPIE, 1999,3680(7): 668-678.

    [4] [4] MADOU M. Fundamentals of microfabrication[M]. CRC Press, New York, 1997: 253-290.

    [5] [5] Bright V M, Comtois J H, Ried J R, et al. Surface micromachined micro-opto-electro-mechanical systems[J]. IEICE Trans. Electron, 1997, E80-C(2):206-213.

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    [in Chinese], [in Chinese], [in Chinese], [in Chinese]. MOEMS device and its applications[J]. Optics and Precision Engineering, 2004, 12(z1): 36

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    Published Online: Nov. 3, 2006

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