Optics and Precision Engineering, Volume. 27, Issue 8, 1774(2019)
Optimal design and experiment of a high-bandwidth two-degree-of-freedom parallel nanopositioning stage
Figures & Tables(0)
Tools
Get Citation
Copy Citation Text
LIN Sheng-long, ZHANG Xian-min, ZHU Ben-liang. Optimal design and experiment of a high-bandwidth two-degree-of-freedom parallel nanopositioning stage[J]. Optics and Precision Engineering, 2019, 27(8): 1774
Paper Information
Category:
Received: Jan. 2, 2019
Accepted: --
Published Online: Jan. 19, 2020
The Author Email: Sheng-long LIN (294703373@qq.com)
© Copyright 2018-2021 | Chinese Laser Press.
All Rights Reserved 沪ICP备15018463号-20