Journal of Applied Optics, Volume. 43, Issue 3, 518(2022)

Tooling calibration of secondary aspheric workpiece position in magneto-rheological polishing

Yu ZHANG... Feng ZHANG, Rui GUO, Ying SU, Yunlong ZHANG, Zengqi XU and Fuchao WANG |Show fewer author(s)
Author Affiliations
  • Xi'an Institute of Applied Optics, Xi'an 710065, China
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    Figures & Tables(9)
    Analysis of workpiece offset
    Tooling setting position 1
    Tooling setting position 2
    Experimental verification of aspheric magneto-rheological polishing tooling
    Surface shape accuracy of workpiece before and after magneto-rheological polishing
    • Table 1. Relationship between Unknown environment 'document' and Unknown environment 'document'

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      Table 1. Relationship between Unknown environment 'document' and Unknown environment 'document'

      序号$ c $$L/{\rm_{mm}}$${\beta _1}$/(°) $r/{\rm{mm}}$${d_1}/{\rm{mm}}$$a/{\rm{mm}}$$\Delta {X_2}/{\rm{mm}}$$\Delta {X_2}/a$
      10.002488815015.310610043.93961−0.288−0.288
      0.5−0.144−0.288
      0.1−0.0288−0.288
      0.01−0.00288−0.288
      −10.287−0.287
      20.00219215013.518810051.02521−0.253−0.253
      0.5−0.126−0.252
      0.1−0.0252−0.252
      0.01−0.00252−0.252
      −10.252−0.252
      30.00264173515011.206910026.37371−0.333−0.333
      0.5−0.166−0.332
      0.1−0.0332−0.332
      0.01−0.00332−0.332
      −10.332−0.332
    • Table 2. Parameters of Φ 230 mm aspheric mirror

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      Table 2. Parameters of Φ 230 mm aspheric mirror

      类型参数
      材料熔石英
      口径/mmΦ230
    • Table 3. Coordinate values of tooling setting position

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      Table 3. Coordinate values of tooling setting position

      X/mm Y/mm A/(°) B/(°)
      1−43.939 60015.3106
      243.939 600−15.3106
      3047.426 015.177 90
      40−47.426 0−15.177 90
    • Table 4. Offset calculation

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      Table 4. Offset calculation

      方向调整次数${Z_1}/{\rm{mm} }$${Z_2}/{\rm{mm}}$ΔZ/mm $a/{\rm{mm} }$
      X0−62.637−62.5110.1260.171
      1−62.571−62.5740.0030.004
      Y0−62.222−62.1340.0880.117
      1−62.179−62.1660.0130.018
      2−62.178−62.1740.0040.005
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    Yu ZHANG, Feng ZHANG, Rui GUO, Ying SU, Yunlong ZHANG, Zengqi XU, Fuchao WANG. Tooling calibration of secondary aspheric workpiece position in magneto-rheological polishing[J]. Journal of Applied Optics, 2022, 43(3): 518

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    Paper Information

    Category: OPTICAL ELEMENT AND FABRICATION

    Received: Nov. 18, 2021

    Accepted: --

    Published Online: Jun. 7, 2022

    The Author Email:

    DOI:10.5768/JAO202243.0305002

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