[1] [1] LIU C,HUANG J B,ZHU Z,et al.A micromachined flow shear-stress sensor based on thermal transfer principles[J].J MEMS,1999,8(1):90-99.

[2] [2] SCHMIDT M A,HOWE R T,SENTURIA S D,et al.Design and calibration of a microfabricated floating-element shearstress sensor[J].IEEE Tran on Elect,1988,35 (6):750-757.

[3] [3] SHAJII J,NG K Y,SCHMIDT M A.A microfabricated floating-element shear stress sensor using wafer-bonding technology[J].J MEMS,1982,1(2):89-94.

[4] [4] GOLDBERG H D,BREUER K S,SCHMIDT M A.A silicon wafer-bonding technology for microfabricatedshear-stress sensors with backside contacts[C].Solid-State Sensor and Actuator Workshop,Hilton Head,1994:111-115.

[5] [5] PADMANABHAN A,GOLDBERG H D,SCHMIDT M A,et al.A wafer-bonded floating-element shear-stress microsensor with optical position sensing by photodiodes[J].J MEMS,1996,5(44):307-315.

[6] [6] ZHE J,FARMER K R,MODI V.A MEMS device for measurement of skin friction using capacitance sensing[C].Proc of IEEE MEMS 01,Berkeley,CA,2001:4-7.

[7] [7] PE(N)A J.Characterization of a MEMS optical floating-element shear stress sensor[J].Journal of Undergraduate Research,2003,5(2):