Chinese Journal of Quantum Electronics, Volume. 26, Issue 1, 102(2009)
Microstructure and surface morphology of Cu/TaN multilayer films with different modulation periods
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ZHAO Hai-kuo, LUO Xiang-dong. Microstructure and surface morphology of Cu/TaN multilayer films with different modulation periods[J]. Chinese Journal of Quantum Electronics, 2009, 26(1): 102
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Received: Apr. 21, 2008
Accepted: --
Published Online: May. 24, 2010
The Author Email: Hai-kuo ZHAO (zhk201@qq.com)
CSTR:32186.14.