Chinese Journal of Quantum Electronics, Volume. 26, Issue 1, 102(2009)

Microstructure and surface morphology of Cu/TaN multilayer films with different modulation periods

Hai-kuo ZHAO* and Xiang-dong LUO
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    ZHAO Hai-kuo, LUO Xiang-dong. Microstructure and surface morphology of Cu/TaN multilayer films with different modulation periods[J]. Chinese Journal of Quantum Electronics, 2009, 26(1): 102

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    Paper Information

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    Received: Apr. 21, 2008

    Accepted: --

    Published Online: May. 24, 2010

    The Author Email: Hai-kuo ZHAO (zhk201@qq.com)

    DOI:

    CSTR:32186.14.

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