According to the applications of Diamond-Like Carbon(DLC) films to precision mechanical parts, a method to deposit a DLC film by DC-CVD at room temperature was explored to improve the bonding strength between film and metal substrates. The a-Si∶H intermediate material was intercalated between a substrate and a DLC film, and friction properties and bonding strength of the a-Si∶H∶DLC films deposited on different metal substrates were investigated and evaluated, and then their friction coefficients, fatigue failure life and the wear were determined by Ball-on-Disk. Experimental results show that the bonding strength at the interface is greatly improved by intercalating a-Si∶H intermediate layer, the DLC film is completely worn out without delaminating. Moreover, the maximum thickness of film deposited by the equipment developed by ourselves is less than 3.3 μm, the failure lifetime within the thickness of 1 μm is up to 0.7 million cycles as applying a load of 2.94 N (point load), and the friction coefficients between DLC film and SiC, Si3N4, SUS304, SUJ2 are about 0.1-0.15. In conclusion, the bonding strength and friction properties of the film can satisfy the requirements of precision mechanical parts.