[1] [1] DONG X Z,CHEN W Q, ZHAO ZH SH, et al.. Femtosecond laser two-photon micro-/nano-fabrication and its applications ［J］. Chinese Science Bulletin, 2008, 53(1): 2-13. (in Chinese)

[2] [2] GONG X J, CHU J R, YANG J J,et al.. An improved way for fabricating micro-waveguide by femtosecond laser ［J］. Opt．Precision Eng., 2007, 15(1): 27-32. (in Chinese)

[3] [3] ZHANG Y L, CHENG Q D, XIA H, et al.. Designable 3D nanofabrication by femtosecond laser direct writing ［J］. Nanotoday, 2010, 5(5): 435-448.

[4] [4] JIANG ZH W, YUAN D J, ZHU A D, et al.. 2-photon 3-D mircofabrication technology and its experimental system ［J］. Opt. Precision Eng.,2003,11(3): 234-238.(in Chinese)

[5] [5] TORMEN M, BUSINARO L, ALTISSIMO M, et al.. 3D patterning by means of nanoimprinting, X-ray and two-photon lithography ［J］. Microelectronic Engineering, 2004, 73: 535-541.

[6] [6] SHOJI S, KAWATA S. Photofabrication of three-dimensional photonic crystals by multibeam laser interference into a photopolymerizable resin ［J］. Applied Physics Letters, 2000, 76(19): 2668-2670.

[7] [7] KATO J,TAKEYASU N,ADACHI Y,et al.. Multiple-spot parallel processing for laser micronanofabrication ［J］. Applied Physics Letters, 2005, 86(4): 044102-044104.

[8] [8] DONG X Z, ZHAO ZH SH, DUAN X M. Micronanofabrication of assembled three-dimensional microstructures by designable multiple beams multiphoton processing ［J］. Applied Physics Letters, 2007, 91(12): 124103-124105.

[9] [9] HAYASAKI Y, SUGIMOTO T, TAKITA A, et al.. Variable holographic femtosecond laser processing by use of a spatial light modulator ［J］. Applied Physics Letters, 2005, 87(3): 031101-031103.

[10] [10] GITTARD S D, NGUYEN A, OBATA K,et al.. Fabrication of microscale medical devices by two-photon polymerization with multiple foci via a spatial light modulator ［J］. Biomedical Optics Express,2011, 2(11): 3167-3178.

[11] [11] LIN H, JIA B H, GU M. Dynamic generation of debye diffraction-limited multifocal arrays for direct laser printing nanofabrication ［J］. Optics Letters,2011, 36(3): 406-408.

[12] [12] KUANG Z, PERRIE W, LIU D, et al.. Ultra short pulse laser patterning of indium tin oxide thin films on glass by uniform diffractive beam patterns ［J］. Applied Surface Science, 2012,258 (19): 7601-7606.

[13] [13] GERCHBERG R W, SAXTON W O. A practical algorithm for the determination of phase from image and diffraction plane pictures ［J］. Optik, 1972, 35: 237-246.