Optics and Precision Engineering, Volume. 21, Issue 6, 1524(2013)
Linear piezoelectric actuator applied to interference microscope
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ZHU Hua, CAO Ru-yi, JIAN Lei. Linear piezoelectric actuator applied to interference microscope[J]. Optics and Precision Engineering, 2013, 21(6): 1524
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Received: Nov. 14, 2012
Accepted: --
Published Online: Jul. 1, 2013
The Author Email: Hua ZHU (hzhu103@nuaa.edu.cn)
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