Infrared and Laser Engineering, Volume. 52, Issue 3, 20220504(2023)
Error control of diffractive optical element fabricated by single point diamond turning
Figures & Tables(11)
Fig. 1. Schematic diagram of residual area of diffraction structure turning
Fig. 3. The actual plane shape of diffraction structure compared with the approximate oblique plane
Fig. 7. Measurement results of diffraction structure position error
Fig. 9. Measurement results of surface roughness in the center region of diffraction element
Table 1. Diffraction plane parameters
View tableView in ArticleTable 1. Diffraction plane parameters
Wavelength/λ Diameter/mm Depth/μm Diffractive parameters Z2 Z4 Z6 Z8 Z10 632.8 nm 10 3.07 88.625385 −0.0138 47387 3.480883e-006 9.2470349e-007 −3.6203 993e-007
Table 2. Tool parameters and machining parameters
View tableView in ArticleTable 2. Tool parameters and machining parameters
Tool parameters Machining parameters Radius/mm Rake/(°) Clearance/(°) Speed/rpm Feedrate/mm·min–1 Cutting depth/μm 0.02 0 10 2 000 1 2
Tools
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Yuetian Huang, Bin Fan, Shijie Li, Haifeng Liang, Changlong Cai, Weiguo Liu. Error control of diffractive optical element fabricated by single point diamond turning[J]. Infrared and Laser Engineering, 2023, 52(3): 20220504
Paper Information
Category: Optical design
Received: Jul. 21, 2022
Accepted: --
Published Online: Apr. 12, 2023
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