Optics and Precision Engineering, Volume. 24, Issue 11, 2636(2016)

Sub-nanometer precision optical fabrication of CaF2 materials

ZHANG Chun-lei*... XU Le, LIU Jian, MA Zhan-long, WANG Fei, GU Yong-qiang, DAI Lei and PENG Shi-jun |Show fewer author(s)
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    References(19)

    [1] [1] MCINTYRE G, SANDERS D, RATNAM S, et al..The limitations of high index resists for 193 nm hyper-NA lithography [J]. SPIE, 2008, 6923: 692304-1-12.

    [2] [2] XIE CH. Research on Magnetorheological Finishing Techniques of Optical Mirror Materials of CaF2 [D]. Changsha: Graduate School of National University of Defense Technology, 2009.(in Chinese)

    [3] [3] MA ZH L, WANG J L. Ultra-precision optical fabrication technology [J]. Infrared and Laser Engineering, 2013, 42(6): 1485-1490. (in Chinese)

    [4] [4] MA ZH L, SUI Y X. Large optical surface error figuring by ion beam [J]. Acta Optica Sinica, 2014, 34(1): 012201-1-5.(in Chinese)

    [8] [8] WANG D H. Study on Chemical Mechanical Polishing of Calcium Fluoride Single Crystal [D]. Changchun: Changchun University of Science and Technology, 2009. (in Chinese)

    [9] [9] FENG J B. Study on the Optical Processing Technique of Large Size CaF2 Crystal [D]. Changchun: Changchun University of Science and Technology, 2012. (in Chinese)

    [10] [10] LI SH Y, DAI Y F. New Technology for Manufacturing and Measurement of Large and Middle-Scale Aspheric Surfaces [M]. Beijing: National Defense Industry Press, 2011. (in Chinese)

    [12] [12] MEHTA P K, REID P B. A mathematical model for optical smoothing prediction of high-spatial frequency surface errors [J]. SPIE, 1999, 3786: 447-459.

    [13] [13] TUELL M T, BURGE J H, ANDERSON B. Aspheric optics: smoothing the ripples with semi-flexible tools [J]. Optical Engineering, 2002, 41(7): 2002.

    [14] [14] NIE X Q, LI SH Y, SHI F, et al..Generalized numerical pressure distribution model for smoothing polishing of irregular midspatial frequency errors [J]. Applied Optics, 2014, 53(6): 1020-1027.

    [15] [15] NIE X Q, LI SH Y, SHI F, et al.. Control of mid-spatial frequency errors considering the pad groove feature in smoothing polishing process [J]. Applied Optics, 2014, 53(28): 6332-6339.

    [17] [17] SU D Q, MIAO E L, SUI Y X, et al.. Absolute surface figure testing by shift-rotation method using Zernike polynomials [J]. Optics Letters, 2012, 37(15): 3198-3200.

    [18] [18] YANG ZH. Study on Specification and Analysis of Frequency Band Errors on Deterministic Optical Machining [D]. Changsha: National University of Defense Technology, 2008. (in Chinese)

    [19] [19] XU W C. Optical Design and Imaging Performance Compensation for the Lithographic Lens [D].Beijing: Chinese Academy of Sciences, 2011. (in Chinese)

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    ZHANG Chun-lei, XU Le, LIU Jian, MA Zhan-long, WANG Fei, GU Yong-qiang, DAI Lei, PENG Shi-jun. Sub-nanometer precision optical fabrication of CaF2 materials[J]. Optics and Precision Engineering, 2016, 24(11): 2636

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    Paper Information

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    Received: Apr. 26, 2016

    Accepted: --

    Published Online: Dec. 26, 2016

    The Author Email: Chun-lei ZHANG (zcll_1981@126.com)

    DOI:10.3788/ope.20162411.2636

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