Fig. 1. 1-on-1 measurement method

Fig. 2. S-on-1 measurement method

Fig. 3. R-on-1 measurement method

Fig. 4. Schematic of dual-wavelength LIDT measuring device

Fig. 5. Physical image of dual-wavelength LIDT measuring device

Fig. 6. Schematic diagram of laser beam diagnosis system

Fig. 7. Physical image of online damage detection system

Fig. 8. User interface of LIDT measurement software

Fig. 9. Curves of damage probability

Fig. 10. Damage morphology of aluminum reflection films and antireflection films under 1 064 nm laser irradiation