[1] [1] Zhang Ruili, Du Hongwen, Zhang Yaping, et al. Studies of antireflection properties of SiC thin films prepared by PECVD[J]. Journal of Zhejiang Sci-Tech University, 2010, 27(2): 254-257. (in Chinese)

[2] [2] Craciun D, Socol G, Cristea D V, et al. Mechanical properties of pulsed laser deposited nanocrystalline SiC films[J]. Applied Surface Science, 2015, 336: 391-395.

[3] [3] Li Zhuolin, Lee W B. Study on removal characteristic of silicon carbide surface in precision mechanical polishing[J]. Infrared and Laser Engineering, 2016, 45(2): 0220003. (in Chinese)

[4] [4] Wang Sicong, Ji Lingfei, Wu Yan, et al. Progress in research on luminescence properties and modification of SiC[J]. Journal of Materials Engineering, 2017, 45(2): 102-111. (in Chinese)

[5] [5] Zhao Rucheng, Bao Jianxun. Investigation and application of large scale lightweight SiC mirror[J]. Chinese Optics, 2014, 7(4): 552-558. (in Chinese)

[6] [6] Chen Hong, Gao Jinsong, Song Qi, et al. Si modified coating on SiC substrate by ion beam assisted deposition[J]. Optics and Precision Engineering, 2008, 16(3): 381-385. (in Chinese)

[7] [7] Sun Wenli, Xu Jun, Lu Wenqi. Chemical structure and growth mechanism of a-SixC1-x: H films prepared by plasma enhanced magnetron sputtering[J]. Acta Physico-Chimica Sinica, 2010, 26(8): 2311-2316. (in Chinese)

[8] [8] Li Shuxin, Cao Yunqing, Rui Yunjun, et al. Effect of hydrogen plasma treatment on the photoelectric properties of single layer silicon carbide thin films[C]//13th National Conference on Thin Solid Films, 2012, 8: 178. (in Chinese)

[9] [9] Chang Yong. Diamond Like Film Deposition by Pulsed Laser Deposition[M]. Beijing: Science Press, 2017: 67-68. (in Chinese)

[10] [10] Reitano R, Baeri P, Marino N. Excimer laser induced thermal evaporation and ablation of silicon carbide[J]. Applied Surface Science, 1996, (96-98): 302-308.

[11] [11] Socola G, Galcab A C, Craciuna D, et al. Pulsed laser deposition of nanocrystalline SiC films[J]. Applied Surface Science, 2014, 306: 66-69.

[12] [12] Liu Huasong, Yang Xiao, Liu Dandan, et al. Physical model of optical constants of SiO2 thin films[J]. Infrared and Laser Engineering, 2017, 46(9): 0921003. (in Chinese)

[13] [13] Shen Zhenfeng. Preparation of a specific refractive index material by doping for optical thin films [J]. Chinese Optics, 2013, 6(6): 900-904. (in Chinese)

[14] [14] Wang Fengli, Zhang Zhuangzhuang, Wang Zhanshan, et al. Optical contast of MgF2 coatings for Al/MgF2 mirror in vacuum ultraviolet region[J]. Optics and Precision Engineering, 2017, 25(11): 2823-2828. (in Chinese)

[15] [15] Pan Yongqiang, Wu Zhensen. Infrared optical properties of hydrogenated amorphous carbon films (a-C:H)[J]. Infrared and Laser Engineering, 2006, 35(6): 777-779.(in Chinese)