Chinese Optics Letters, Volume. 15, Issue 4, 043401(2017)

13.5  nm Schwarzschild microscope with high magnification and high resolution

Shenghao Chen, Xin Wang, Qiushi Huang, Shuang Ma, and Zhanshan Wang*
Author Affiliations
  • Key Laboratory of Advanced Micro-Structured Materials MOE, Institute of Precision Optical Engineering, School of Physics Science and Engineering, Tongji University, Shanghai 200092, China
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    Figures & Tables(10)
    Optical structure of the Schwarzschild microscope.
    Image MTF curve of the Schwarzschild objective.
    Object resolutions along with the change of object distance at different FOVs: (a) 1 to 1200 nm resolution; (b) zoomed-in view of the 0 to 450 nm resolutions in (a).
    Object resolutions along with the change of image distance at different FOVs.
    MTF of different errors.
    Schematic of the source and the Schwarzschild imaging system.
    Best imaging figure and the intensity profile.
    Comparison of the results between the simulation and experiment.
    Best object points are imaged ten times.
    • Table 1. Parameters of the Schwarzschild Objective

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      Table 1. Parameters of the Schwarzschild Objective

      L1 (mm)L2 (mm)L3(mm)H1 (mm)H2 (mm)R1 (mm)R2 (mm)
      119.65960.5043221.00047.5929.82493.45232.480
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    Shenghao Chen, Xin Wang, Qiushi Huang, Shuang Ma, Zhanshan Wang, "13.5  nm Schwarzschild microscope with high magnification and high resolution," Chin.Opt.Lett. 15, 043401 (2017)

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    Paper Information

    Category: X-ray Optics

    Received: Nov. 2, 2016

    Accepted: Jan. 24, 2017

    Published Online: Jul. 25, 2018

    The Author Email: Zhanshan Wang (wangzs@tongji.edu.cn)

    DOI:10.3788/COL201715.043401

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